INNOViON maintains a large complement of high and medium current implanters with low-energy capable tools for handling 2-inch to 200mm substrates, including advanced tooling with Axcelis GSD and Varian E500 implanters. All implant processing is performed within Class 10 or better micro environments at the tools.

200mm Diameter

  • Axcelis GSD/200E, GSD/200EE
  • Varian E1000
  • Varian E500
  • Varian E220

≤ 150mm Diameter

  • Axcelis GSD/200E
  • Varian E1000
  • Varian E500
  • Varian 400-10
  • Varian E220
  • Custom NV based HE
  • Eaton NV10-180
  • Eaton NV10-160
  • Eaton NV10-80
  • Eaton 6200A
  • Eaton 6200AV
Specialty Diameters
  • 2”, 3” and smaller diameter substrate processing available
  • Capabilities to handle fractional and unique substrate materials
Key Features and Capabilities
  • Energy range from 500 eV to 3.0 MeV
  • Choice of full-ring clamp, 2-point clamp, clampless disks or single wafer processing
  • Tilt angle from 0° to 60°
  • Implant rotation capability
  • Chained Implants
  • Heated Implants
  • High energy capabilities for all diameters

Clean Room Bay - 2 Varian E500s with SMIF capability

Varian EHP500
GSD 200HE
Axcelis GSD 200
Eaton GSD 200 & GSD 200HE with SMIF Capability
Preventive Maintenance
Dessicator Storage of Implanter Wheels
Dessicator Storage of Implanter Wheels
   
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