INNOViON Announces 150mm HE Capability

March 25, 2008 - San Jose, CA

INNOViON Corporation, a provider of foundry ion implant services for the micro-electronics industry, announced today that it has further expanded its capabilities by dedicating a modern Axcelis GSD/HE implanter to the 150mm market.


Steven Swanson, INNOViON Vice President Sales, commented "Consistent with other recent announcements, INNOViON continues to expand our reach into markets which have been underserved. While our existing toolset had the capability to reach energies up to 600 keV for 150mm (with custom tooling supporting Hydrogen and Helium implants from 2" - 150mm), this move opens the potential energy up to 3000 keV, and does so on a modern, high quality platform. This coupled with our recent addition of dedicated tooling to address "alternative implant species", now brings INNOViON's service and expertise to a whole new group of customers."


About INNOViON

INNOViON is the leading global provider of foundry ion implantation support and service to the microelectronic industry. Formed in 2001, INNOViON represents a combination of two industry leaders (Implant Center, Inc. and Ion Implant Services, Inc.), with over 25 years of experience in this specialized technology segment. INNOViON has three regional production facilities located in San Jose, CA, Gresham, OR, and Chandler, AZ. All facilities operate 7 days per week and are equipped with a broad range of tooling supporting both standard and specialty implants in diameter ranges of 2" through 200mm. All sites also offer a full range of Fab Service support, including ion source and subassembly rebuilds and miscellaneous parts cleaning for all implanter models. INNOViON is a privately-held corporation and is headquartered at 2121 Zanker Road, San Jose, California. More information about INNOViON is available on line at www.innovioncorp.com.